Analytical modelling of a Dual Frequency Capacitive Sheath.

机译：双频电容护套的分析建模。

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We present an analytical model of a sheath that is operated two separate frequencies. The solution of this model is then compared to PIC simulation results finding good agreement.

机译：我们介绍了一个由两个单独的频率操作的护套的分析模型。然后将该模型的解决方案与PIC仿真结果进行比较，找到了良好的一致性。

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《International Conference on Phenomena in Ionized Gases》|2003年||共2页
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J. Robiche; P. C. Boyle; M. M. Turner; A. R. Ellingboe; ICPIG;
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中图分类天然气加工;
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Analytical modelling of a Dual Frequency Capacitive Sheath.

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