Ion beam techniques used for light elements composition estimation of complex multielemental layers prepared by magnetron sputtering

摘要

Quaternary Si-B-C-N films with gut high-temperature and harsh-environment properties were prepared by deposition by reactive dc magnetron cosputtering using a target containing B, Si, C in nitrogen-argon gas mixtures. Resulting composition and mechanical and temperature characteristic are given by preparation parameters. The suitable methods for estimation of elemental composition are non-destructive IBA methods ERDA for hydrogen amount and RBS for other elements. Due to the presence of B, C, Si, N as fabricating and O, H, Ar as admixture elements the single RBS spectra are very unreadable due the overlapping signal of all elements. This problem is solved using more non-Rutherford analyses suited for sought after elements.