Reactive oxygen species in RF-driven atmospheric pressure plasma jets

摘要

Absolute number densities of the three main reactive oxygen species (ROS) created in a capacitivelycoupled radio-frequency-driven atmospheric pressure plasma jet are measured by different optical methods: atomic oxygen (O) and ozone (O_3) inside the discharge as well as the output of meta-stable singlet-delta oxygen molecules (SDO). The results are compared to a one-dimensional numerical simulation of the discharge. The simulation yields a good qualitative agreement and a further understanding of the relevant plasma production and destruction mechanisms inside the discharge. Since oppositional trends for the different ROS densities within the operational range of the discharge are found, it is promising to reveal the predominant mechanisms and to tailor the ROS composition towards specific bio-material treatments and therapeutic applications.