We present a study carried out on a capacitively coupled radiofrequency pulsed plasma with the aim of determining the effect of different pulse shapes on the overall discharge properties. A set of differently shaped pulses were used to generate discharges in a low pressure radiofrequency discharge and measurements of electron density, made using microwave resonance hairpin probes, and optical emission spectra, made using a spectrometer and a gated ICCD, were used to characterise the discharge. The study was carried out in a capacitively coupled radiofrequency discharge generated in a Gaseous Electronics Conference (GEC) reference reactor with gas pressure in the range of 6 - 70 Pa, radiofrequency power in the range of 1 - 100 W, and pulse duration in the range of 10 μs - 100 ms. Tailored pulses can be used to control the development of electron energy and electron density.
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