Impact wear resistance of silicon, oxygen and nitrogen containing amorphous carbon films deposited on steel substrates using PECVD

摘要

Diamond-like carbon coatings with various doping were deposited on different substrate materials (silicon, glass, polycarbonate and steel) in capacitively coupled r.f. discharge. Complete atomic compositions, including hydrogen content and film densities, were determined by combination of RBS and ERD analyses. The mechanical properties of prepared coatings were studied by means of depth sensing indentation technique. The dynamic impact wear tester has been used to evaluate the impact resistance of the prepared coatings. The tribological properties were studied using CSM pin-on-disc tester. The effect of intrinsic stress on the coating properties was investigated. The variation in SiOx content enabled to minimize the intrinsic compressive stress in coatings.