Simulation of Short-Pulse Laser Interaction with Matter Using Finite-Difference Time - Domain Method and Two Temperature Model

摘要

A numerical model for simulating short-pulse laser interaction with matters is presented. This model has a capacity to simulate laser beams with various wavelengths and pulse widths down to femtosecond range by directly solving Maxwell's equations using Finite-Difference Time-Domain (FDTD) method. This method also makes it possible to simulate the laser beam propagation and heat generation in a wide range of materials, such as metals, semiconductors, and dielectrics. Combined with Two-Temperature Model for electrons and lattices, simulation results on the electromagnetic field and thermal energy generation in the silicon substrate and temperature histories of electrons and lattices are presented.