Effect of Grinding Fluid Supply on Ultra-smoothness Grinding of Fine Ceramics

摘要

The effect of the grinding fluid supply on ultra-smoothness grinding of silicon carbide ceramic is examined. The main results obtained are as follows: (1) Grinding fluid supply is necessary for the ultra-smoothness grinding of silicon carbide ceramic. In case of dry grinding, the surface topography like melted surface layer due to thermal softening is observed on the workpiece surface. (2) Grinding fluid type has the strong influence on the ultra-smoothness grinding of silicon carbide ceramic. It is important to select the suitable dilution of grinding fluid for obtaining the ultra-smoothness surface. (3) The dilution of grinding fluid has the influence on the surface roughness in ultra-smoothness grinding of silicon carbide ceramic. (4) The 3D and 2D surface roughnesses of silicon carbide ceramic formed using the newly developed ultra-smoothness grinding method and the suitable grinding condition attain about 30nm(Rz) or 2.5 nm(Ra), and about 10nm(Rz) or 1.5nm(Ra), respectively.