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A Direct-solution Fuzzy Collaborative Intelligence Approach for Yield Forecasting in Semiconductor Manufacturing

机译:半导体制造中产量预测的直接解决方案模糊协作智能方法

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Yield forecasting is a critical task to every semiconductor manufacturer. However, the existing methods for yield forecasting often deal with the logarithmic or log-sigmoid value, rather than the original value, of yield. To resolve this problem, in this study, the fuzzy collaborative intelligence (FCI) method proposed by Chen and Lin (2008) is modified, so that it can consider the original value of yield directly. The modified FCI method is called the direct-solution (DS)-FCI approach. The effectiveness of the DS-FCI approach was validated with a real case. The experimental results showed that the DS-FCI approach outperformed Chen and Lin's FCI method in improving the forecasting accuracy and precision.
机译:产量预测是每个半导体制造商的关键任务。然而,现有的收益率预测方法通常会处理对数或对数或符号的值,而不是原始值的产量。为了解决这个问题,在本研究中,修改了陈和林(2008)提出的模糊协作智能(FCI)方法,以便直接考虑产量的原始值。修改的FCI方法称为直接解决方案(DS)-FCI方法。 DS-FCI方法的有效性验证了实际情况。实验结果表明,DS-FCI方法优于陈和林的FCI方法,从而提高预测精度和精度。

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