This paper presents research carried out at the University of Southampton into the development of a magnetostrictive thick-film material suitable for use with silicon micro-machined devices. This form of magnetostrictive material has previously been deposited onto alumina substrates and this paper reports further work on migrating the technology onto silicon. The evaluation of two alternative glass frits for use as the binder within the thick-film is reported. The correct choice of the binder material is important because it is responsible for binding the active material within the film also adhering the film to the substrate. A series of tests have been applied to samples fabricated using various glass frits to assess their mechanical properties and suitability for use in micro-actuator applications.
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