SnO{sub}2 thin film sensors for organic vapors

摘要

The influence of oxygen and organic vapors on SnO{sub}2 thin films conductance has been studied in different conditions. Gas sensitivity for different vapors was researched under different temperatures. It was pointed that oxygen and water presence influenced the sensor sensitivity. The mechanism of interaction of SnO{sub}2 surface with ethanol mixture was proposed. Oxygen role in such processes was discussed. For determination of structural peculiarities XRD experiments were provided.