CAD Environment for Micro Components

摘要

In this paper we present the software environment BICEPS, a T-CAD tool designed to assist developers of micro-components. Originally developed to control the design process for silicon wet-etching, this workflow oriented environment is being extended by a rule based validation tool for process sequences. First we give a brief overview about the facilities offered by BICEPS for designing and verifying mask layouts using the mask optimisation tool OMEA and the etch simulation software SUZANA. The wet etching process is used as an example of how a workflow based system can manage the micro- component design processes. In the second part of this paper emphasis is given to the computer aided validation of process sequences.