Miniature Integrated IR Gas Sensors

摘要

It is important to monitor the "ocean of air" that surrounds us to protect our health, safety, and the environment. Today we (humankind) are using inadequate technologies: 1) Infrared (IR) spectroscopy sensors that are accurate and reliable yet bulky and expensive 2) Electrochemical sensors that are smaller and less expensive but much less reliable. Ion Optics has developed proprietary MEMS and two- dimensional photonic bandgap technology that provides IR gas sensing performance at the size and cost of electrochemical sensors. The SensorChip is a wavelength- tuned, MEMS-based micro-bridge element. Using photonic bandgap technology, the micro-bridge emits and absorbs efficiently in a narrow waveband centered on the signature wavelength of the target gas. Our ability to tune the micro- bridge IR emission and absorption allows us to integrate the optical filter, detector, and IR source onto a single silicon microbridge and offer a 10x power consumption improvement over discrete infrared gas sensors. Using standard semiconductor lithography techniques, Ion Optics is able to create two-dimensional photonic bandgap structures on the surface of the silicon microbridge. A simple lithographic mask change allows Ion Optics to change the spectral tuning of the micro-bridge in production. Thus we are literally "printing" sensors on silicon-on-insulator wafers. Several products are in development for industrial safety and monitoring, building safety sensors, and medical sensors. Long term opportunities abound with applications protecting health, safety, and the environment.