Nowadays mechanical components of silicon microsystems are almost designed by using only FEM simulation programs. These modern design tools are very helpful for the determination of the mechanical behaviour of measurement elements with defined geometrical dimensions. However, this solution is unsuitable for the design optimisation of measurement elements because of the high effort for FEM- simulations: for each variation of the design parameters a new simulation is required. On the other hand, analytical solutions are more suitable for the optimisation of the sensor element design. The accuracy of results depends mainly on simplifications of the physical modelling of the real structure. Due to the aforementioned simplifications, these models are not suitable to specify accurately the mechanical behaviour of all real silicon pressure plates. In this work, the influence of boundary conditions of the silicon plate on the maximal deflection and the mechanical stresses on the edges of the square plate are investigated. The results of the analytical solution will be compared with the results of FEM simulations. In particular, the results of the analytical descriptions for the deflection of both a fixed clamped plate and an elastically supported one will be compared with the corresponding FEM simulation results.
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