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Application of Memory Tester for Non-Destructive Detection of Micro-Crack and Crack Patterns in Flash Memory Devices

机译:存储器测试仪在闪存器件中的微裂纹和裂纹图案的非破坏性检测中的应用

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Cracks on silicon die occur in a variety of patterns, because of varying amounts of force applied on die in varying directions. A common, non-destructive technique to detect cracked die is analysis with a Scanning Acoustic Microscope (SAM).[1] Although SAM is widely used to detect cracked die, empirical data infer that the technique does not quite detect several cases of crack that are observed by optical inspection after decapsulation of a package using chemicals - i.e., a destructive inspection technique. This study introduces a new, non-destructive inspection technique for die crack and crack pattern using a memory tester. The concept of the technique is based upon the fact that almost ninety percent of the space of a memory device consists of cell memories, thus if micro-crack is present, the phenomenon would cause malfunctioning of the memory- e.g., unable to be programmed, erased or read. By detecting and plotting - e.g., as a physical BITMAP-any electrical abnormalities in the memory cells, micro-crack pattern could be easily observed and studied.
机译:硅模具上的裂缝发生在各种图案中,因为在不同方向上施加在模具上的力量不同的力。用扫描声学显微镜(SAM)检测裂纹模具的常见的非破坏性技术是分析。[1]虽然SAM广泛用于检测裂纹模具,但经验数据推断,该技术在使用化学物质 - I.E的解膜后,该技术不能检测到通过光学检查观察的几个裂缝裂缝裂缝。本研究介绍了使用记忆测试仪的模具裂缝和裂纹模式的新的非破坏性检查技术。该技术的概念基于以下事实,即存储器设备的近百分之九十的空间由单元存储器组成,因此如果存在微裂纹,则该现象会导致存储器故障 - 例如,无法被编程,擦除或阅读。通过检测和绘制 - 例如,作为物理位图 - 存储器单元中的任何电异常,可以容易地观察和研究微裂纹图案。

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