Hybrid single mode lasers fabricated using Si/SiO_2/SiON micromachined platforms

摘要

We have devised a hybridization scheme that, given suitable Fabri-Perot (F-P) gain medium, allows us to fabricate small, mechanically robust single frequency lasers in a wide spectral range, limited only by the transparency of the SiON material. In this report we discuss device fabrication and present characteristics of a laser emitting in red spectral range. The laser operates at or near room temperature under continuous wave excitation and emits 5 mW of power in single mode with 40 dB side mode suppression.