Electrostatically driven display device using evanescent coupling between sheet waveguide and multicantilevers

摘要

In this study, a new display device based on physical contact and evanescent coupling is developed. The device consists of a glass substrate as a waveguide and electrostatically-driven multi-cantilevers on a silicon substrate. The incident light guided into the waveguide is transferred into the cantilevers due to the physical contact and the evanescent coupling between the waveguide and the multi-cantilevers when a voltage is applied. By the contact, the switched light is emitted from the side-edge of the contacted multi-cantilevers. The widely emitted output-light is realized by the integration of the cantilevers and the simplified structure. Therefore, the device is expected as the display application. The device is fabricated using MEMS process and bonding process. From the experimental results, a contrast of 0.9 is obtained at 170V, and the stable drive is attained up to 1KhZ. As a result, the usefulness of the device structure is confirmed.