Creation of Nanoscale Electronic Devices by the Swift Heavy Ion Technology

摘要

Recent years have brought a renaissance of interest in swift heavy ion track technology, for the sake of prospective novel applications, i.e. creation of nanoscale electronic devices. This paper summarizes some of the newly emerging possibilities, and the strategies that have been initiated. Only a few applications that are based on latent tracks have emerged since then, such as the exploitation of phase transitions, chemical changes, the enhanced free volume along latent tracks, or their capability to trap diffusing penetrants. For contrast, etched tracks in both polymer foils and SiO{sub}2 layers appear to have a much greater application potential. Compact rods and tubules as well as dispersed nanosized matter can be embedded within the etched tracks, to form the base of various applications.