MICROSTRUCTURES FOR PRECISION CEMENTED CARBIDE MICRO-DIE MACHINED BY FIB

摘要

Micro-dies for WC-10wt.Co containing 0.5 μm and 5 μm of WC grain sizes were fabricated by focused Ga{sup}+ ion beam with 30 keV and 187 pA and the surfaces of them were investigated by atomic force microscopy (AFM). The surface of WC is smooth, however, it of Co phase is rough for both cemented carbides. The surface roughness increases with increasing the width of Co phase. Thus, it is important for smooth surface by FIB machining for cemented carbide micro-die to control Co phase.