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MLS based temperature modulation of micro-hotplates

机译:MLS基于微热的温度调制

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Even if a great deal of work has been done with temperature-modulated micro-hotplate gas sensors, the selection of the modulating frequencies remains an obscure and non-systematic method. Here we introduce a method, borrowed from the field of system identification, to systematically select modulation frequencies to enhance sensor selectivity. We report for the first time that maximum length pseudorandom binary sequences (MLS) can be used to modulate the working temperature of metal oxide micro-hotplate gas sensors, in a wide frequency range. The impulse response of a pair sensor-gas is computed from the circular cross-correlation of the MLS temperature-modulating sequence and sensor response sequence, This method enables each system sensor-gas to be identified and to find, in a systematic way, those modulation frequencies that are important to discriminate between different gases and to estimate gas concentration. This is demonstrated by obtaining the impulse response of integrated microarrays of either sputtered or screen-printed WO{sub}3 in the presence of pollutant gases.
机译:即使采用温度调制的微型热板气体传感器完成了大量工作,调制频率的选择仍然是一个模糊和非系统的方法。在这里,我们介绍了一种从系统识别领域借用的方法,以系统地选择调制频率以增强传感器选择性。我们首次报告该最大长度伪随机二进制序列(MLS)可用于调节金属氧化物微型热板气体传感器的工作温度,在宽频范围内。从MLS温度调制序列和传感器响应序列的圆形互相关计算的对传感器气体的脉冲响应,该方法使每个系统传感器气体能够以系统的方式识别并找到那些对不同气体和估计气体浓度之间的调制频率非常重要。通过在存在污染物气体存在下获得溅射或丝网印刷的WO} 3的集成微阵列的脉冲响应来证明这一点。

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