This paper presents vibration assisted nanopositioning (VAN) - a novel approach for mitigating the adverse effects of pre-rolling friction on the settling time of roller bearing nanopositioning stages using high frequency vibration. The novelty of VAN is in the way it synergistically combines the mechanical design and control of the stage to mitigate pre-rolling friction without jeopardizing positioning precision. After a brief introduction, the concept of VAN is described and its superior performance and robustness relative to a recently-proposed friction compensation method is demonstrated in simulations. The design of a prototype VAN stage is then outlined, and the prototype stage is used in preliminary experiments to demonstrate up to 61.7% reduction of settling time compared to a stage without VAN.
展开▼
