DESIGN AND ANALYSIS OF IRONLESS PERMANENT MAGNET LINEAR SYNCHRONOUS MOTOR WITH LITTLE FORCE RIPPLES FOR ULTRA-PRECISION POSITIONING SYSTEMS

摘要

Ironless permanent magnet synchronous linear motor (ILPMLSM) are widely applied in the field of ultra-precision positioning systems [1]. The accuracy of the model of the ILPMLSM affects the performance for positioning. Therefore, the high accurate model of the force is necessary.