Recent years, a demand of the micro fabrication is increasing in many industries. A tungsten carbide has potentials for micro fabrications because of its mechanical properties such as stiffness, thermal expansion. The carbide material has been machined by high energy beam processes, electrical discharge machining or abrasive processes so far. However, these conventional processes require a finishing process to finish the machined surface and remove the damaged layer of the material. To simplify or avoid this arduous process, a cutting on carbide materials is investigated[1,2]. The author has tried a micro milling by PCD (Poly Crystal Diamond) coated carbide endmills on tungsten carbide[3-5]. This kind tool has many economic advantages. In usual, the price of this tool is 4-10 times smaller than the PCD or SCD (Single Crystal Diamond) solid tools. In addition, it can machine the smooth surfaces, its arithmetic mean roughness (Ra) is less than 50 nm on the tungsten carbide[3].
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