This paper presents the design and demonstrated performance of a low-cost, centimeter-scale, six-axis nanopositioner driven by electromagnetic actuators with applications in nanomanufacturing and scanning-probe microscopy. The planar device can operate linearly with a range-of-motion of nearly 8 micrometers in the x-, y- and z- directions with a first resonance of 120 Hz. Sensor-limited repeatability of better than 20nm has been demonstrated, while the minimum measured step size is 10nm. The system is a first step toward the design of a high-speed meso-scale six-axis device. As such, it can be scaled down to several millimeters in size, enabling highspeed and precise positioning of small samples such as probe tips and thin-film materials.
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