Lagrangian and Hamiltonian formalism to establish the equations of motion for modelling a micro-mechanical acceleration sensor

摘要

The contribution offers a method for the analysis of coupled electro-mechanical systems which also contain dissipation by means of the "extended" Hamiltonian. The method is applied to analyze the coupling between the mechanical and electrical parts in a micro-mechanical acceleration sensor. The analysis sets up the Hamiltonian and its canonical equations of motion are derived.