Diffraction grating modeling by RCWA and CM methods: diffraction efficiency synchronism studies

摘要

This contribution concentrates on modeling of diffraction processes in optical diffraction gratings (ODG). First, the approach to characterization of mechanisms and diffraction processes is briefly presented, together with the regions with typical diffraction regimes. Different types of diffraction efficiency volume phase synchronism are then described. Different situations are analyzed and compared concerning ODG of different types, different refractive index / relief modulation profiles, various modulation strengths, and incident wave polarization influence. As examples, the cases of conical and Littrow mounts are discussed in detail. As rigorous modeling tools, both rigorous coupled wave analysis, and coordinate transformation methods are used, implemented, and modified.