Long travel Advanced Nanopositiong Stage with Non-contact Magnetic Lead Screw and Coplan Moving Stage with independent Driving Mechanism

摘要

An accuracy and high resolution positioning stage is an important apparatus for precision manufacturing and dimensional metrology. The piezoelectric transducer is applied as actuator for several hundreds micrometer range moving stage with nanometer resolution. For long travel range such as larger than 10 mm with nanometer resolution, there are some investigations on magnetic driving actuator or voice coil actuator. This paper describes a long travel advanced nanopositioning stage with a travel range of 100 mm × 100 mm and nanometer resolution.