Compensation methods of relative position errors between tool tip and workpiece by using high response fine motion mechanism

摘要

This study describes a scheme to measure and control the relative displacement between tool tip and workpiece in real time. First, a scheme of the tool-workpiece closed loop control is presented. The tool tip motion for flat surface machining is selected for our investigation, and a machine tool with a displacement sensor and a flat mirror is prepared, which set measure the straightness of the motion. This machine has three-axes (global axes) and a fine motion device in the Z (vertical) axis. A controller, which controls relative position between tool tip and workpiece with the fine motion device while moving global axes, are designed and investigated.