Using the Grating Light Valve~(TM) Device as a multichannel variable optical attenuator (VOA) for the 1.55 μm spectral region

摘要

The Grating Light Valve~(TM) (GLV~(TM)) spatial light modulator is a unique and proven CMOS process-compatible optical MEMS device. The modulator employs a dynamically adjustable diffraction grating to manipulate and optical signal. Today, the GLV~(TM) technology is successfully used in high-resolution display and imaging systems, where its high efficiency, large dynamic range, precise analog attenuation, fast switching speed, high reliability, high yield, and the ability to integrate thousands of channels into a single device are fundamental advantages. These same properties make the GLV~(TM) device desirable for optical telecommunication applications. The optical properties, functionality, devices design, and CMOS processing of the GLV~(TM) will be presented. Challenges and solutions that arise from adapting the current GLV~(TM) technology to optical telecommunications wavelengths will be discussed. Measured results will be presented that describe GLV~(TM) performance parameters, including insertion loss, dynamic range, polarization dependent loss, and spectral attenuation accuracy.