Measurement of Anisotorpic Thermal Diffusivity of High-Conductivity Materials by Dynamic Grating Radiometry (Application to Highly Oriented Diamond Film)

摘要

For the thermal design of electronic devices, the accurate thermal properties are important. In order to measure the anisotropic thermal diffusivity of high-conductivity materials, a new apparatus based on dynamic grating radiometry (DGR) have been developed. In this method, the sample is heated by the interference fringe pattern, and the decay of temperature distribution is detected by the high-speed infrared detector. This paper describes the applicability to measure the anisotropic thermal diffusivity of 10 μm-thick highly oriented diamond film (on the substrate of single crystal Si). The results show the difficulties and possibilities to measure the transparent CVD diamond by DGR.