The Effect of Suqareness on the Performance of the Ultra-Precision Machine

摘要

To achieve a measuring uncertainty of less than ultra-precision level, it is generally necessary to analyze the effect of squareness on machine, such as CMMs and profilometer [1]. These squareness of the movement axis of high-precision platforms require more accuracy. The accurate error measurement of the precision motion platform is the prerequisite for the implementation of the motion platform operations [2].