A ROLL-TO-ROLL SYSTEM FOR IN-LINE, TIP BASED NANOMETROLOGY OF PATTERNED MATERIALS AND DEVICES

摘要

This paper presents the development of a proof-of-concept tool to preform nanoscale metrology for process control in the roll-to-roll manufacturing of nanopatterened materials, films, and flexible electronic devices. The system leverages a uniquely compact single-chip atomic force microscope (sc-AFM) positioned with nanoscale precision over a stainless-steel, air bearing supported idler roller and dynamically actuated to compensate for curvature, eccentricity and surface topology of the roller to perform a single, 15 μm × 17 μm rectangular scan on the flexible substrate with nanometer resolution every 60 seconds.