BASIC CHARACTERISTICS OF NOVEL HYBRID ACTUATOR INTEGRATING A THERMAL BIAS ELEMENT AND AN ELECTROMAGNETIC DRIVING ELEMENT

摘要

Many industrial mechanisms are used in industry, and different applications demand different characteristics. Some applications require a high speed and high response motion. For example, semiconductor exposure apparatuses or coordinate measuring machines need to provide a high speed and high response motion [1]. On the other hand, motion mechanisms for other applications are required to generate a large thrust force rather than produce a high response motion. Injection molding machines or press machines are good examples.