VACUUM COMPATIBLE CONTACTLESS ACTIVE MAGNETIC LINEAR BEARINGS FOR HIGH CLEANLINESS ROBOTIC APPLICATIONS

摘要

Magnetic bearings could provide an advantageous alternative to conventional rolling element bearings [1]. Given that magnetic bearings are contactless, there is no mechanical friction and thus very little particle generation. Moreover, there is no need for lubrication which enables invacuum operation without significant outgassing or molecular contamination. These aspects make that contamination seals can be omitted.