MEASUREMENT AND COMPENSATION OF BAR-MIRROR FLATNESS AND SQUARENESS ERROR USING HIGH PRECISION STAGE

机译：使用高精度阶段测量和补偿条形镜平坦度和方块误差

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In this paper, performances of precision stage are improved by error compensation. To reduce straightness and squareness error, bar-mirror's flatness and squareness error are measured and compensated. And after evaluate precision stage's straightness error using laser calibrator.

机译：在本文中，通过误差补偿改善了精密阶段的性能。为了减少直线度和方形误差，测量并补偿条形镜的平坦度和方形误差。使用激光校准器评估精密阶段的直线误差。

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《Annual Meeting of the American Society for Precision Engineering》|2011年||共4页
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Siwoong Woo; Dahoon Ahn; Daegab Gweon; Sunho Lee; Junkyu Park;
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中图分类几何量计量;
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MEASUREMENT AND COMPENSATION OF BAR-MIRROR FLATNESS AND SQUARENESS ERROR USING HIGH PRECISION STAGE

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