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Procedures and Pitfalls in Measuring Surface Resistance in Deposited Films at Very Low and Very High Values

机译:在非常低且非常高的值下测量沉积薄膜表面电阻的程序和陷阱

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When manufacturing resistive coatings that are not in the packaging range of 0.5 to 1.0 Ohms/square some different measuring techniques and precautions may be needed. The old tried and true procedure of applying a large current between two metallic idler rollers and measuring the voltage produced by the resistance of the web between the idlers may lead to some errors. In the case of 0.01 to 0.1 Ohms/Square (rfid and flexible circuitry applications) the necessary currents to get a voltage that is much larger than noise in the wiring system may require currents that can cause some damage to the coating at the contact lines. At the other end of the range, 50 to 5 million Ohms/square (microwave cooking and radar evading and spacecraft charge bleeding and electrostatic loudspeakers) plasmas being used in the coater or even inadvertently produced can "short out" the sample region and cause false readings. The high impedance resistor in the measuring circuit makes the circuit much more susceptible to noise. The average aluminizer boat currents provide a giant jumble of possible magnetically induced noise in the measurement circuits. Some rules of thumb will be presented and some interesting cases discussed. Much material has been extracted from the internet and citations as to where to find the original material are given. Today there are many excellent resources with illustrations available on the internet. The author has reproduced several of them here along with the citation to find the original material. It seems wasteful to try to improve on other's good work. Examples from the author's experience are added in along with opinions as to suitable instrumentation.
机译:当不在封装范围内的电阻涂层0.5至1.0欧姆/平方时,可能需要一些不同的测量技术和预防措施。在两个金属惰轮滚筒之间施加大电流的旧经验和真实程序,并在惰轮之间测量由网之间的电阻产生的电压可能导致一些误差。在0.01至0.1欧姆/平方/平方(RFID和柔性电路应用)的情况下,获得远大于布线系统中的噪声的电压的必要电流可能需要电流,这可能会在接触线上对涂层造成一些损坏。在该范围的另一端,50至500万欧姆/平方(微波炉烹饪和雷达逃避和航天器电荷出血和静电扬声器)等离子体在涂布机中使用或甚至无意地制作的等离子体可以“短暂”样本区域并导致错误读物。测量电路中的高阻抗电阻使电路更容易受到噪声的影响。平均铝化器船电流提供测量电路中可能的磁诱导噪声的巨大混合。将提出一些拇指规则,并讨论了一些有趣的案件。从Internet和引用中提取了许多材料,以及给出原始材料的位置。今天,互联网上有许多优秀的资源。提交人在这里复制了其中几个引用以找到原始材料。试图改善别人的良好工作似乎是浪费的。提交人经验的示例随着适当仪器的意见而加入。

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