Modal pattern analysis and experimental Investigation of multimode interferometric sensing: a path to fully integrated silicon-CMOS-based chem/bio sensors

摘要

A multimode, Mach-Zehnder, chem/bio sensor with sensitivity developed through modal pattern analysis is demonstrated on silicon. Simulated and experimental data show that waveguide structures less than 5000-μm-long enable folly-integrated sensors with index sensitivities near 3×10{sup}(-6) and methanol-in-vapor sensitivities near 250 parts-per-billion vapor (ppbv).