Detecting characteristics of thin-film NTC infrared sensors fabricated by micromachining technology were studied. In order to reduce the thermal mass and increase the responsivity, the sensing element was built-up on a thin membrane. The overall structure of detector had a form of Au/Ti/NTC/SiO/sub x//[100]Si. Detecting characteristics of NTC sensor were monitored by the dynamic method. B, TCR and R/sub 25/spl deg/C/ of sensors are 3,249K, 3.7%//spl deg/C and 4M/spl Omega/, which are suitable for bolometer applications. And, the rise time is 80msec, so it is appropriate for thermal sensors.
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机译：研究了微加工技术制造的薄膜NTC红外传感器的检测特性。为了降低热质量并增加响应度，在薄膜上建立传感元件。检测器的整体结构具有Au / Ti / NTC / SIO / SUB X // [100] SI的形式。通过动态方法监测NTC传感器的检测特性。 B，TCR和R / SEC 25 / SPL DEG / C /传感器为3,249K，3.7％// SPL DEG / C和4M / SPLω/，适用于钻孔计应用。并且，上升时间为80毫秒，因此热传感器是适当的。
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