Simultaneous observation of ferroelectric domains and surface morphology using scanning nonlinear dielectric microscopy

摘要

A new type of scanning nonlinear dielectric microscope (SNDM), with an additional function of simultaneous observation of surface morphology, has been developed. This was achieved by using an electrically conducting atomic force microscopy cantilever as a probe needle. Using this new SNDM, simultaneous measurements of several ferroelectric materials, such as periodically polarized LiNbO/sub 3/ and PZT thin films on SrTiO/sub 3/ substrates, were performed. Topographic and domain images, which were simultaneously taken from the same location of the materials, were successfully obtained. The result shows that nano-sized ferroelectric domains with the width of 1.5 nm for PZT thin film having a good correlation with a topographic image were observed.