Calculation of the optical quantities characterizing inhomogeneous thin films using a new mathematical procedure based on the matrix formalism and Drude approximation

摘要

In this contribution a new mathematical procedure enabling us to calculate the optical quantities of the inhomogeneous thin films such as reflectance, transmittance and ellipsometric parameters will be described. This procedure is based on combining the known matrix formalism and Drude approximation. The inhomogeneous thin films is replaced by a multilayer system containing the thin films with a linear profiles of the dielectric function and different thicknesses. Every individual film of the multilayer system is described by the matrix corresponding to the Drude approximation. Using this procedure one can construct an efficient algorithm allowing to calculate the values of the optical quantities of the inhomogeneous thin films exhibiting great gradients of the refractive index profiles.