Asymmetrical Polysilicon Electrothermal Microactuators for Achieving Large In-Plane Mechanical Forces and Deflections

摘要

This research focuses on the design and experimental characterization of two types of asymmetrical MEMS electrothermal microactuators. Both MEMS polysilicon electrothermal microac-tuator designs use resistive (Joule) heating to generate thermal expansion and movement. Deflection and force measurements as a function of applied electrical power are presented.