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A new 6-D measuring device for rotary table calibration

机译:一种用于旋转台校准的新型6-D测量装置

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摘要

Like linear feed axes, rotary tables have six types of systematic error. These errors are mainly caused by the inaccuracy of the manufacturing and assembly process of the rotary table, which results in a disturbing movement superposed on the theoretical rotation. The six systematic errors of rotary tables can be divided into two groups, the first being the translational error, i.e. two eccentricity errors along the local x- and y-axis, and the axial runout along the local z-axis (rotating axis), and the second being three angular errors, i.e. two wobble errors about the local x- and y-axis, and the angular error about the local z-axis. This paper presents a calibration device capable of measuring all six systematic errors of rotary tables simultaneously in a single continuous measurement according to ISO 230[l, 2]. The measuring device is based on an angle encoder with a waffle-type grating placed on a cylindrical surface. Using six scanning heads in a certain geometric arrangement, it is possible to measure the systematic error of rotary tables in six dimensions. This paper describes the mathematical transformations between the six measuring quantities and the six errors of the rotary table, and how geometric uncertainties of the sensor set-up influence the system accuracy of the measuring device.
机译:像线性馈送轴一样,旋转表有六种系统的误差。这些误差主要由旋转台的制造和组装过程的不准确性引起,这导致令人不安的运动叠加在理论旋转上。旋转表的六个系统误差可以分为两组,首先是平移误差,即沿局部x和y轴的两个偏心误差,以及沿局部z轴(旋转轴)的轴向跳动,第二个是三个角度误差,即围绕局部x和y轴的两个摆动误差,以及局部z轴的角度误差。本文介绍了一种校准装置,其能够在根据ISO 230 [L,2]的单一连续测量中同时测量旋转桌的所有六个系统误差。测量装置基于角度编码器,该角度编码器具有放置在圆柱形表面上的华夫饼式光栅。在某种几何布置中使用六个扫描头,可以测量六个维度的旋转表的系统误差。本文介绍了六个测量量与旋转台的六个误差之间的数学变换以及传感器设置的几何不确定性如何影响测量装置的系统精度。

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