Low-energy femtosecond laser micromachining for fabrication of CNT-based field emitter arrays

机译：低能量飞秒激光微机械加工用于基于CNT的现场发射器阵列

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摘要

A low-energy femtosecond laser micromachining system, which is effectively applied to fabricate micro-structured carbon nanotube field emitter arrays with different tip sizes and shapes, is presented. Superior emission characteristics are obtained with the patterned structures.

机译：提供了一种低能量飞秒激光微机械系统，其有效地应用于制造具有不同尖端尺寸和形状的微结构化碳纳米管场发射阵列。用图案化结构获得卓越的发射特性。

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《Pacific Rim Conference on Lasers and Electro-Optics》|2009年||共2页
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I. H. Baek; N. T. Hong; S. Lee; Y. H. Ahn; K. Kim; F. Rotermund;
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中图分类 TN2-53;
关键词
Femtosecond laser; Micromachining; Carbon nanotube; Field emitter;

机译：飞秒激光;微机械;碳纳米管;现场发射器;

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3. Micro-Nano Fabrication of Self-Aligned Silicon Electron Field Emitter Arrays Using Pulsed KrF Laser Irradiation [J] . Integrated Ferroelectrics . 2019,第期

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4. Low-energy femtosecond laser micromachining for fabrication of CNT-based field emitter arrays [C] . Baek I. H., Hong N. T., Lee S., Lasers amp; Electro Optics amp; The Pacific Rim Conference on Lasers and Electro-Optics, 2009. CLEO/PACIFIC RIM '09 . 2009

机译：低能飞秒激光微加工用于制造基于CNT的场发射器阵列
5. Experimental characterization of femtosecond laser micromachining for silicon mold fabrication and hot embossing for polymer microreplication. [D] . Belligundu, Sunil Ranganath. 2005

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Low-energy femtosecond laser micromachining for fabrication of CNT-based field emitter arrays

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