Among the AFM system components, nano scanners play a most important role of the system accuracy and bandwidth. An actuator driven by VCM with a flexure hinge can be a good candidate because of advantages, such as linear operation, wide travel length, and bi-directional actuation. However, small damping coefficient of the VCM actuator generates mechanical vibration. It decreases AFM imaging speed and system measurement accuracy. To reduce the vibration of the VCM actuator, a moving command filter is used and the experiment results are shown.
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