Synthesis and Characterization of Cu/CoFe2O4 Magnetic Nanocomposite for RFIC Application

摘要

A Cu/CoFe_2O_4 nanocomposite film and related CMOS compatible processes using alkaline noncyanide based copper plating solution have been successfully synthesized, characterized and proposed for RFIC application in this paper. The SQUID (Superconducting Quantum Interference Device Magnetometer) measurement indicates that magnetic properties of Cu can be modified from diamagnetism to ferromagnetism via the incorporation of CoFe_2O_4 superparamagnetic nanoparticles into a Cu matrix to form the Cu/CoFe_2O_4 nanocomposite film which is plated in the bath with 5g/L CoFe_2O_4. Without largely sacrificing the reduction of electrical conductivity of Cu (<10 percent), the Cu/CoFe_2O_4 nanocomposite material shows its potential for the fabrication of high performance cost-effective on-chip spiral inductor due to the effective reductions of inductor size, self-resonant frequency, and eddy current loss.