首页> 外文会议>International Congress on Applications of Lasers Electro-Optics >CREATING ROUND AND SQUARE FLATTOP LASER SPOTS IN MICROPROCESSING SYSTEMS WITH SCANNING OPTICS
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CREATING ROUND AND SQUARE FLATTOP LASER SPOTS IN MICROPROCESSING SYSTEMS WITH SCANNING OPTICS

机译:用扫描光学系统在微处理系统中创建圆形和方形圆锥激光斑点

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Performance of various modern laser based micromachining techniques can be improved by applying square laser spots with uniform intensity distribution. And providing possibility of scanning of such a spot over whole working field with using popular 2- and 3-axis galvo mirror scanners is of great importance for many laser microprocessing technologies, like scribing, drilling vias in PCB, flat panel display repair. These tasks can be successfully solved with using the field mapping refractive beam shaping optics like πShaper and Focal-πShaper. Due to their unique features, such as low output divergence, high transmittance as well as extended depth of field these beam shapers provide a freedom in building an optimum optical system. Depending on the conditions of a particular technique it is possible to apply either a πShaper with imaging optics or a Focal-πShaper with focusing lenses. And important feature of these approaches is in easy adaptability to optical design of already existing material processing systems. There will be considered several optical layouts based on various refractive beam shapers πShaper/Focal-πShaper to generate square shaped laser spots of uniform intensity which sizes span from several tens of microns to millimetres. Examples of real implementations will be presented as well.
机译:通过使用具有均匀强度分布的方向激光斑点,可以改善各种现代激光的微机械技术的性能。通过使用流行的2和3轴Galvo镜扫描仪提供各种工作领域这种现场的可能性对于许多激光微处理技术非常重要,如划线,钻孔通过PCB,平板显示器修复。可以使用像πshaper和焦πshaper等现场映射折射束整形光学器件成功解决这些任务。由于其独特的特征,例如低输出发散,高透射率以及扩展的景深这些光束成形器在构建最佳光学系统方面提供自由度。取决于特定技术的条件,可以将具有成像光学器件的πκα或具有聚焦透镜的焦πα应用。这些方法的重要特征在于已经存在现有材料处理系统的光学设计方便。将考虑基于各种折射束整形器πshaper/焦πshaper的几种光学布局,以产生均匀强度的方形激光斑点,其尺寸从几十个微米到毫米。实际实现的示例也将呈现。

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