ELECTRODE ABLATION ON PIEZOELECTRIC CERAMICS BY NS-PULSED LASER ABLATION FOR SENSOR APPLICATIONS

摘要

This paper discusses the formation of complex geometry electrode structures on piezoelectric ceramic substrates using nanosecond pulsed laser ablation. Optical microscopy, scanning electron microscopy and surface profiling are used to examine the impact of the laser ablation process onto the substrate material. The influence of laser power, pulse energy and scanning speed on electrode removal and potential substrate damage is discussed. Fabricated prototypes with different electrode designs and potential sensing applications are presented.