Trident-type tuning fork silicon gyroscope by the phase difference detection

摘要

The trident-type tuning fork silicon gyroscope was designed and fabricated. The trident-type tuning fork structure and vacuum packaging has a Q value higher than 15000. A new detection principle which is based on the phase difference detection is proposed and is confirmed using the fabricated gyroscope. By this detecting method, it is possible to detect the angular rate without control of the driving amplitude. The gyroscope sensitivity obtained was 180 /spl mu/V/deg/sec.