Nano-metal-ink-based electrode embedded in parylene HARS with the aid of the capillary effect

摘要

Microfabrication technology for free-standing parylene high-aspect-ratio structures (HARS) with embedded electrodes has been developed. Nano- metal ink is infused into capillaries in parylene HARS using the surface tension force. Micro electrodes in complex parylene springs have been successfully developed, and their robustness is demonstrated under large-amplitude in-plane vibration of the springs.