首页> 外文会议>International Conference on Flexible Automation and Interlligent Manufacturing >THE APPLICABILITY OF PETRI NET MODELS IN THE CONTROL OF RE-ENTRANT FLOW SEMICONDUCTOR WAFER FABRICATION
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THE APPLICABILITY OF PETRI NET MODELS IN THE CONTROL OF RE-ENTRANT FLOW SEMICONDUCTOR WAFER FABRICATION

机译:Petri网模型在重新进入流动半导体晶片制造中的控制中的适用性

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Re-entrant flow manufacturing lines, such as occur in semiconductor wafer fabrication, are characterized by a product routing that consists of multiple visits to a workstation or group of workstations during the manufacturing process. In this paper, a modeling approach based on the use of generalized Petri nets (GPN) for a re-entrant flow manufacturing line is presented. Specifically, three Petri net models representing a re-entrant flow line with three work centers and six machines are modeled. How these models may be used to represent a variety of queuing disciplines and work release policies is discussed.
机译:重新参赛者流动制造线,例如在半导体晶片制造中发生的,其特征在于,产品路由包括在制造过程中对工作站或工作站组的多次访问。本文介绍了基于使用用于再参赛流制造线的广义Petri网(GPN)的建模方法。具体而言,三个代表具有三个工作中心和六台机器的重新参赛者流线的三种Petri网模型是建模的。如何使用这些模型来代表各种排队学科和工作发布策略。

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