Machining and wear lead to residual stresses and micro-plastic deformation in the surface layers of ceramics. Theses residual stresses are determined in silicon carbide and silicon nitride by conventional and advanced X-ray diffraction depth probing techniques. The effect of different finishing procedures like lapping and polishing on the near-surface strength and the abrasive wear behaviour of silicon carbide is determined by ball-on-plate tests and by water-lubricated sliding wear tests. For silicon nitride the effect of different grinding procedures and laser assisted turning on the rolling wear behaviour is investigated. The influence of the residual stresses on the wear behaviour is discussed.
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